Rapid Thermal Processing and Beyond
Applications in Semiconductor Processing : Special Topic Volume : Selected Papers From RTP Specialists All Over the World, Dornstadt, GermanyeBook - 2008
Heat-treatment and thermal annealing are very common processing steps which have been employed during semiconductor manufacturing right from the beginning of integrated circuit technology. In order to minimize undesired diffusion, and other thermal budget-dependent effects, the trend has been to reduce the annealing time sharply by switching from standard furnace batch-processing (involving several hours or even days), to rapid thermal processing involving soaking times of just a few seconds. This transition from thermal equilibrium, to highly non-equilibrium, processing was very challenging a.
Publisher: Stafa-Zurich, Switzerland ; United Kingdom ; Enfield, NH : Trans-Tech Publications, ©2008
Characteristics: 1 online resource (xvi, 432 pages) : iil