Microelectromechanical SystemsMicroelectromechanical Systems
Advanced Materials and Fabrication Methods
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eBook, 1997
Current format, eBook, 1997, , All copies in use.
eBook, 1997
Current format, eBook, 1997, , All copies in use. Offered in 0 more formats
Microelectromenchanical systems (MEMS) is a field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. MEMS is a multidisciplinary field involving challenges and opportunities for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry.
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